Shim, C.,
Jo, Y.,
Cha, H. K.,
Kim, M. K.,
Kim, H.,
Kook, G.,
Kim, K.,
Son, G. H. &
Lee, H. J.,
2020 Jan,
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc.,
p. 380-383 4 p. 9056250. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2020-January).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution