17.6 Conversion efficiency multicrystalline silicon solar cells using the reactive ion etching with the damage removal etching

Engineering & Materials Science

• Silicon solar cells 100%
• Reactive ion etching 99%
• Etching 79%
• Conversion efficiency 77%
• Texturing 53%
• Solar cells 22%
• Plasmas 19%
• Screen printing 13%
• Open circuit voltage 12%
• Silicon wafers 12%
• Short circuit currents 10%

Physics & Astronomy

• etching 55%
• solar cells 54%
• damage 52%
• ions 34%
• emitters 11%
• reflectance 9%
• short circuit currents 6%
• open circuit voltage 6%
• printing 6%
• wafers 5%
• silicon 3%

Chemical Compounds

• Etching 66%
• Solar Cell 63%
• Ion 29%
• Drop 14%
• Short Circuit 8%
• Voltage 5%
• Surface 5%
• Plasma 5%
• Mixture 3%