17.6 Conversion efficiency multicrystalline silicon solar cells using the reactive ion etching with the damage removal etching

Ji Myung Shim, Hyun Woo Lee, Kyeong Yeon Cho, Jae Keun Seo, Ji Soo Kim, Eun Joo Lee, Jun Young Choi, Dong Joon Oh, Jeong Eun Shin, Ji Sun Kim, Ji Hyun Kong, Soo Hong Lee, Hae Seok Lee

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