A 300-GHz CMOS 7-by-7 Detector Array for Optics-less THz Imaging with Scan-less Target Object

  • Kiryong Song
  • , Jungsoo Kim
  • , Doyoon Kim
  • , Junghwan Yoo
  • , Jae Sung Rieh*
  • *Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    In this work, a 300-GHz 7 × 7 detector array based on a 65-nm Si CMOS technology has been developed and transmission imaging was performed using the detector array without any optical elements. The detector array consists of a 7-by-7 arrangement of 49 pixels in a full-chip size of 4 mm × 4 mm. The unit pixel is composed of a single direct detector with a differential common-gate configuration and a differential patch antenna. The fabricated CMOS detector array chip was mounted on a planar package for electrical characterization and imaging. The measured responsivity and the noise equivalent power (NEP) showed best values of 3599 V/W and 12.46 pW/Hz1/2, respectively, at 303 GHz. Various THz imaging experiments were carried out based on the packaged CMOS detector array with a setup that does not require optical elements or the raster scan of the target object.

    Original languageEnglish
    Pages (from-to)202-214
    Number of pages13
    JournalJournal of Infrared, Millimeter, and Terahertz Waves
    Volume41
    Issue number2
    DOIs
    Publication statusPublished - 2020 Feb 1

    Bibliographical note

    Funding Information:
    This work was supported by Institute of Information & Communications Technology Planning & Evaluation (IITP) grant funded by the Korea government (MSIT) (No. 2016-0-00185) Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

    Publisher Copyright:
    © 2020, Springer Science+Business Media, LLC, part of Springer Nature.

    Keywords

    • CMOS
    • Detector array
    • Terahertz
    • Transmission imaging

    ASJC Scopus subject areas

    • Radiation
    • Instrumentation
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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