@inproceedings{a98f89d1f860456287bb19d97ea41e9f,
title = "A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal",
abstract = "To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.",
author = "Chua, {B. L.} and M. Zhang and Huber, {J. M.} and Broeke, {R. G.} and Wexler, {A. S.} and Tien, {N. C.} and Niemeier, {D. A.} and Holmen, {B. A.}",
year = "2005",
doi = "10.1109/MEMSYS.2005.1454030",
language = "English",
isbn = "0780387325",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "718--721",
booktitle = "Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest",
note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",
}