A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

In Sung Hwang; Yoon Sung Kim; Sun Jung Kim; Byeong Kwon Ju; Jong Heun Lee

doi:10.1016/j.snb.2008.10.042

A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

In Sung Hwang, Yoon Sung Kim, Sun Jung Kim, Byeong Kwon Ju, Jong Heun Lee

Research output: Contribution to journal › Article › peer-review

93 Citations (Scopus)

Abstract

This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C₃H₈, C₂H₅OH, and NO₂ but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

Original language	English
Pages (from-to)	224-229
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	136
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2008.10.042
Publication status	Published - 2009 Feb 2

Bibliographical note

Funding Information:
This work was supported by the Korea Science and Engineering Foundation (KOSEF) NRL program grant funded by the Korean government (MEST) (No. R0A-2008-000-20032-0) and a grant from the Fundamental R&D program for Core Technology of Materials (M2008010013) funded by the Ministry of Knowledge Economy, Republic of Korea.

Keywords

Gas sensors
Nanowires network
Polydimethylsiloxane (PDMS) patterning
SnO nanowires
Solution deposition

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2008.10.042

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title = "A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition",

abstract = "This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.",

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AU - Kim, Yoon Sung

AU - Kim, Sun Jung

AU - Ju, Byeong Kwon

AU - Lee, Jong Heun

N1 - Funding Information: This work was supported by the Korea Science and Engineering Foundation (KOSEF) NRL program grant funded by the Korean government (MEST) (No. R0A-2008-000-20032-0) and a grant from the Fundamental R&D program for Core Technology of Materials (M2008010013) funded by the Ministry of Knowledge Economy, Republic of Korea.

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N2 - This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

AB - This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

KW - Gas sensors

KW - Nanowires network

KW - Polydimethylsiloxane (PDMS) patterning

KW - SnO nanowires

KW - Solution deposition

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A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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