A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

In Sung Hwang, Yoon Sung Kim, Sun Jung Kim, Byeong Kwon Ju, Jong Heun Lee

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    93 Citations (Scopus)

    Abstract

    This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

    Original languageEnglish
    Pages (from-to)224-229
    Number of pages6
    JournalSensors and Actuators, B: Chemical
    Volume136
    Issue number1
    DOIs
    Publication statusPublished - 2009 Feb 2

    Bibliographical note

    Funding Information:
    This work was supported by the Korea Science and Engineering Foundation (KOSEF) NRL program grant funded by the Korean government (MEST) (No. R0A-2008-000-20032-0) and a grant from the Fundamental R&D program for Core Technology of Materials (M2008010013) funded by the Ministry of Knowledge Economy, Republic of Korea.

    Keywords

    • Gas sensors
    • Nanowires network
    • Polydimethylsiloxane (PDMS) patterning
    • SnO nanowires
    • Solution deposition

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Metals and Alloys
    • Electrical and Electronic Engineering
    • Materials Chemistry

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