A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

In Sung Hwang, Yoon Sung Kim, Sun Jung Kim, Byeong Kwon Ju, Jong Heun Lee

Research output: Contribution to journalArticlepeer-review

93 Citations (Scopus)

Abstract

This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

Original languageEnglish
Pages (from-to)224-229
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume136
Issue number1
DOIs
Publication statusPublished - 2009 Feb 2

Bibliographical note

Funding Information:
This work was supported by the Korea Science and Engineering Foundation (KOSEF) NRL program grant funded by the Korean government (MEST) (No. R0A-2008-000-20032-0) and a grant from the Fundamental R&D program for Core Technology of Materials (M2008010013) funded by the Ministry of Knowledge Economy, Republic of Korea.

Keywords

  • Gas sensors
  • Nanowires network
  • Polydimethylsiloxane (PDMS) patterning
  • SnO nanowires
  • Solution deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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