@inproceedings{e42070fff9414ed68865ff3858f75a97,
title = "A low voltage two-step micromirror for the pinhole of the confocal microscope",
author = "Hwang, \{Yong Ha\} and Seungoh Han and Lee, \{Byung Kab\} and Kim, \{Jae Soon\} and Pak, \{James Jungho\}",
year = "2005",
doi = "10.1109/OMEMS.2005.1540070",
language = "English",
isbn = "0780392787",
series = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications",
pages = "49--50",
booktitle = "IEEE/LEOS Optical MEMS 2005",
note = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",
}