A micro-electromechanical system based hydrogen gas sensor

E. B. Lee; C. H. Yeo; K. Shin; K. J. Lee; H. J. Lee; W. B. Lee; B. K. Ju

doi:10.1166/sl.2008.552

A micro-electromechanical system based hydrogen gas sensor

E. B. Lee, C. H. Yeo, K. Shin, K. J. Lee, H. J. Lee, W. B. Lee, B. K. Ju

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO₂ ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO₂ gas sensor with the micro-hotplate showed good response to the H₂ gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H₂S, and CH₄. The value obtained of the TCR is 1.61 × 10^-3 K^-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.

Original language	English
Pages (from-to)	1014-1018
Number of pages	5
Journal	Sensor Letters
Volume	6
Issue number	6
DOIs	https://doi.org/10.1166/sl.2008.552
Publication status	Published - 2008 Dec

Keywords

Hydrogen
MEMS
SnO
Temperature coefficient of resistance

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1166/sl.2008.552

Cite this

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title = "A micro-electromechanical system based hydrogen gas sensor",

abstract = "We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10-3 K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.",

keywords = "Hydrogen, MEMS, SnO, Temperature coefficient of resistance",

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AU - Lee, E. B.

AU - Yeo, C. H.

AU - Shin, K.

AU - Lee, K. J.

AU - Lee, H. J.

AU - Lee, W. B.

AU - Ju, B. K.

PY - 2008/12

Y1 - 2008/12

N2 - We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10-3 K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.

AB - We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10-3 K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.

KW - Hydrogen

KW - MEMS

KW - SnO

KW - Temperature coefficient of resistance

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A micro-electromechanical system based hydrogen gas sensor

Abstract

Keywords

ASJC Scopus subject areas

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