A microelectromechanical systems-based vertical magnetometer-accelerometer with the modulated frequency difference in one microstructure

Ji Man Cho, Kyung Soo Kim, Sengdo An, Choel Ho Yeo, Kyoung Shin, Byeong Kwon Ju, Sang Yong Lee, Soo Won Kim

    Research output: Contribution to journal › Article › peer-review

    3 Citations (Scopus)

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    Engineering