A micromachining technique for a thin silicon membrane using merged epitaxial lateral overgrowth of silicon and SiO2 for an etch-stop

James J. Pak*, Abul E. Kabir, Gerold W. Neudeck, James H. Logsdon, David R. DeRoo, Steven E. Staller

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

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Keyphrases

Engineering

Material Science