A new process and structure for oxide semiconductor LCDs

Joon Young Yang, Sul Lee, Seong Joon Cho, Myung Chul Jun, In Byeong Kang, Sang Deog Yeo, Jung ho Park

Research output: Chapter in Book/Report/Conference proceedingChapter

7 Citations (Scopus)


A coplanar TFT structure has excellent characteristics in Δ Vp and channel length compared to conventional etch stopper TFT structure in AOS TFT LCD. In this paper, we introduce new 5 mask coplanar structure which reduces two mask steps compared to conventional 7 mask process. And we fabricated 4.5-inch HD resolution panel in our R&D line with our new structure, and its transmittance is 12.5% improved by eliminating contact hole pattern.

Original languageEnglish
Title of host publicationDigest of Technical Papers - SID International Symposium
PublisherBlackwell Publishing Ltd
Number of pages4
Publication statusPublished - 2014

ASJC Scopus subject areas

  • Engineering(all)


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