A nickel silicide nanowire microscopy tip obtains nanoscale information

Joondong Kim; Young Hyun Shin; Ju Hyung Yun; Chang Soo Han; Moon Seop Hyun; Wayne A. Anderson

doi:10.1088/0957-4484/19/48/485713

A nickel silicide nanowire microscopy tip obtains nanoscale information

Joondong Kim, Young Hyun Shin, Ju Hyung Yun, Chang Soo Han, Moon Seop Hyun, Wayne A. Anderson

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.

Original language	English
Article number	485713
Journal	Nanotechnology
Volume	19
Issue number	48
DOIs	https://doi.org/10.1088/0957-4484/19/48/485713
Publication status	Published - 2008 Dec 3
Externally published	Yes

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0957-4484/19/48/485713

Cite this

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title = "A nickel silicide nanowire microscopy tip obtains nanoscale information",

abstract = "An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.",

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T1 - A nickel silicide nanowire microscopy tip obtains nanoscale information

AU - Kim, Joondong

AU - Shin, Young Hyun

AU - Yun, Ju Hyung

AU - Han, Chang Soo

AU - Hyun, Moon Seop

AU - Anderson, Wayne A.

PY - 2008/12/3

Y1 - 2008/12/3

N2 - An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.

AB - An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.

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A nickel silicide nanowire microscopy tip obtains nanoscale information

Abstract

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