A novel microneedle array integrated with a PDMS biochip for microfluid systems

Seung Joon Paik; Jung Min Lim; Ilwoo Jung; Yonghwa Park; Sangwon Byun; Seok Chung; Kukjin Chun; Junkeun Chang; Dongil Dan Cho

doi:10.1109/SENSOR.2003.1217048

A novel microneedle array integrated with a PDMS biochip for microfluid systems

Seung Joon Paik
, Jung Min Lim
, Ilwoo Jung
, Yonghwa Park
, Sangwon Byun
, Seok Chung
, Kukjin Chun
, Junkeun Chang
, Dongil Dan Cho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

17 Citations (Scopus)

Abstract

This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1446-1449
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1217048
Publication status	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	03/6/8 → 03/6/12

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Anisotropic magnetoresistance
Dry etching
In vitro
In vivo
Ink
Mechanical factors
Mice
Microchannel
Shafts
Testing

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1217048

Cite this

Paik, S. J., Lim, J. M., Jung, I., Park, Y., Byun, S., Chung, S., Chun, K., Chang, J., & Cho, D. D. (2003). A novel microneedle array integrated with a PDMS biochip for microfluid systems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1446-1449). Article 1217048 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217048

A novel microneedle array integrated with a PDMS biochip for microfluid systems. / Paik, Seung Joon; Lim, Jung Min; Jung, Ilwoo et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1446-1449 1217048 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Paik, SJ, Lim, JM, Jung, I, Park, Y, Byun, S, Chung, S, Chun, K, Chang, J & Cho, DD 2003, A novel microneedle array integrated with a PDMS biochip for microfluid systems. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217048, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1446-1449, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1217048

Paik SJ, Lim JM, Jung I, Park Y, Byun S, Chung S et al. A novel microneedle array integrated with a PDMS biochip for microfluid systems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1446-1449. 1217048. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1217048

Paik, Seung Joon ; Lim, Jung Min ; Jung, Ilwoo et al. / A novel microneedle array integrated with a PDMS biochip for microfluid systems. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1446-1449 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{9e28f8ffe37f44edbd6c5b166d08de04,

title = "A novel microneedle array integrated with a PDMS biochip for microfluid systems",

abstract = "This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.",

keywords = "Anisotropic magnetoresistance, Dry etching, In vitro, In vivo, Ink, Mechanical factors, Mice, Microchannel, Shafts, Testing",

author = "Paik, \{Seung Joon\} and Lim, \{Jung Min\} and Ilwoo Jung and Yonghwa Park and Sangwon Byun and Seok Chung and Kukjin Chun and Junkeun Chang and Cho, \{Dongil Dan\}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1217048",

language = "English",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1446--1449",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

}

TY - GEN

T1 - A novel microneedle array integrated with a PDMS biochip for microfluid systems

AU - Paik, Seung Joon

AU - Lim, Jung Min

AU - Jung, Ilwoo

AU - Park, Yonghwa

AU - Byun, Sangwon

AU - Chung, Seok

AU - Chun, Kukjin

AU - Chang, Junkeun

AU - Cho, Dongil Dan

PY - 2003

Y1 - 2003

N2 - This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.

AB - This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.

KW - Anisotropic magnetoresistance

KW - Dry etching

KW - In vitro

KW - In vivo

KW - Ink

KW - Mechanical factors

KW - Mice

KW - Microchannel

KW - Shafts

KW - Testing

UR - https://www.scopus.com/pages/publications/84899837398

U2 - 10.1109/SENSOR.2003.1217048

DO - 10.1109/SENSOR.2003.1217048

M3 - Conference contribution

AN - SCOPUS:84899837398

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1446

EP - 1449

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

A novel microneedle array integrated with a PDMS biochip for microfluid systems

Abstract

Publication series

Other

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this