A platform for on-chip silica optomechanical oscillators with integrated waveguides

Karen E. Grutter, Alejandro Grine, Myung Ki Kim, Niels Quack, Tristan Rocheleau, Clark T.C. Nguyen, Ming C. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We present a new phosphosilicate glass photonic integrated circuit platform for optomechanical systems. Wafer-scale reflow enables high-Q (1.5x106) resonators and closelyspaced (250nm) waveguides. Optomechanical resonance (71.9MHz) is demonstrated.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2012
PagesCW1M.5
Publication statusPublished - 2012
Externally publishedYes
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: 2012 May 62012 May 11

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2012

Other

OtherCLEO: Science and Innovations, CLEO_SI 2012
Country/TerritoryUnited States
CitySan Jose, CA
Period12/5/612/5/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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