A Review on Dry Deposition Techniques: Pathways to Enhanced Perovskite Solar Cells

Jae Keun Hwang, Seok Hyun Jeong, Donghwan Kim, Hae Seok Lee, Yoonmook Kang

Research output: Contribution to journalReview articlepeer-review


This review discusses the use of evaporation, chemical vapor deposition, and sputtering as the three main dry deposition techniques currently available for fabricating perovskite solar cells. We outline the distinct advantages that each method offers in terms of film quality, control, and scalability. Additionally, recent advancements in process optimization and the integration of dry deposition with other fabrication techniques are highlighted. Thus, this review provides valuable insights into the potential of dry deposition processes to produce high-performance perovskite solar cells and aids researchers and industry professionals in selecting the most suitable technique for the fabrication of efficient and stable devices.

Original languageEnglish
Article number5977
Issue number16
Publication statusPublished - 2023 Aug

Bibliographical note

Funding Information:
This work was funded by the New and Renewable Energy Core Technology Program of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) and supported by grants (No. 2023-00236664) from the Ministry of Trade, Industry, and Energy of the Republic of Korea.

Publisher Copyright:
© 2023 by the authors.


  • chemical vapor deposition
  • dry deposition process
  • evaporation
  • perovskite solar cells
  • sputtering

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Engineering (miscellaneous)
  • Energy Engineering and Power Technology
  • Energy (miscellaneous)
  • Control and Optimization
  • Electrical and Electronic Engineering


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