Abstract
In this work, we proposed a new process for fabricating chemical sensors employing multi-walled carbon nanotubes (MWNTs) as the active sensing element. The MWNTs were selectively grown between lateral sides of the catalytic metals on pre-defined Nb electrodes. Upon exposure to air or NH3, the electrical resistance of the MWNTs is found to decrease or increase, respectively. The response time decreases and the sensitivity increases while measurement temperature and gas concentration increase. Though there are a few technical problems to be solved, our results show a promising technique for chemical gas sensor.
Original language | English |
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Pages (from-to) | 118-122 |
Number of pages | 5 |
Journal | Sensors and Actuators, B: Chemical |
Volume | 99 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2004 Apr 15 |
Keywords
- CVD
- Gas sensor
- Lateral growth
- Multi-walled carbon nanotube
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry