@inproceedings{ec4877c46a814c868672f7692d143b88,
title = "A study on the effect of structure and P-doping of Si thin film as an anode for lithium rechargeable batteries",
abstract = "Effects of substrate temperature and phosphor doping on electrochemical characteristics of the silicon film anode were investigated. The silicon thin films were synthesized directly on copper foil by radio-frequency capacitively coupled plasma-enhanced chemical-vapor deposition (r.f.-CVD). The cyclability of the silicon anode greatly depends on the surface morphology and surface resistivity. The silicon film anodes which have granular structure and high conductivity showed higher cyclabilty than those of planer and low conductivity, respectively.",
keywords = "Anode, CVD, Lithium rechargeable battery, Silicon thin film",
author = "Song, {Jin O.} and Shim, {Heung Taek} and Byun, {Dong Jin} and Lee, {Joong Kee}",
year = "2007",
language = "English",
isbn = "3908451310",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 2",
pages = "1063--1066",
booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",
edition = "PART 2",
note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",
}