Abstract
This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994.
| Original language | English |
|---|---|
| Pages (from-to) | 1450-1453 |
| Number of pages | 4 |
| Journal | Transactions of the Korean Institute of Electrical Engineers |
| Volume | 56 |
| Issue number | 8 |
| Publication status | Published - 2007 |
Keywords
- Clark-type
- Dissolved oxygen
- Mmembrane
- Oxygen sensor
ASJC Scopus subject areas
- Electrical and Electronic Engineering