A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films

Chang Jung Kim; Dae Sung Yoon; Joon Sung Lee; Chaun Gi Choi; Kwangsoo No

doi:10.1557/JMR.1997.0145

A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films

Chang Jung Kim, Dae Sung Yoon, Joon Sung Lee, Chaun Gi Choi, Kwangsoo No

Research output: Contribution to journal › Article › peer-review

Abstract

The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.

Original language	English
Pages (from-to)	1043-1047
Number of pages	5
Journal	Journal of Materials Research
Volume	12
Issue number	4
DOIs	https://doi.org/10.1557/JMR.1997.0145
Publication status	Published - 1997 Apr
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films",

abstract = "The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.",

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journal = "Journal of Materials Research",

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AU - Kim, Chang Jung

AU - Yoon, Dae Sung

AU - Lee, Joon Sung

AU - Choi, Chaun Gi

AU - No, Kwangsoo

PY - 1997/4

Y1 - 1997/4

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AB - The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.

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A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films

Abstract

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