Air-gap type film bulk acoustic resonator using flexible thin substrate

  • Yu Ri Kang*
  • , Sung Chul Kang
  • , Kyeong Kap Paek
  • , Yong Kook Kim
  • , Soo Won Kim
  • , Byeong Kwon Ju
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    42 Citations (Scopus)

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    Keyphrases

    Material Science

    Engineering