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Al-Si-N/a-SiN:H thin-film coating for polycarbonate glazing applications
Sehoon An
, Geun Hyuk Lee
, Seong Woo Jang
, Young Woo Kim
,
Sang Ho Lim
,
Donghwan Kim
, Seunghee Han
*
*
Corresponding author for this work
Research output
:
Contribution to journal
›
Article
›
peer-review
3
Citations (Scopus)
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Keyphrases
Thin Film Coating
100%
Polycarbonate Glazing
100%
Alsin
100%
Si Content
40%
UV Transmittance
40%
Average Transmittance
40%
UV-blocking
40%
Room Temperature
20%
Visible Light
20%
Visible Spectrum
20%
UV Radiation
20%
High Hardness
20%
Double-layer Structure
20%
Protective Layer
20%
Layer Deposition
20%
Inductively Coupled Plasma
20%
Hydrogenated Amorphous Si
20%
Si-N
20%
Protective Coatings
20%
Scratch Resistance
20%
Maximum Hardness
20%
H2 Flow Rate
20%
Weatherability
20%
Plasma Enhanced Magnetron Sputtering
20%
Engineering
Thin Films
100%
Polycarbonate
100%
Flow Rate
14%
Room Temperature
14%
Layer Structure
14%
Double Layer
14%
Magnetron
14%
Inductively Coupled Plasma
14%
Protective Layer
14%
Layer Coating
14%
Spectral Range
14%
Flow Velocity
14%
Material Science
Thin Films
100%
Polycarbonate
100%
Thin Film Coating
100%
Magnetron Sputtering
16%
Protective Coating
16%
Physics
Thin Films
100%
Transmittance
57%
Room Temperature
14%
Visible Spectrum
14%
Magnetron Sputtering
14%
Flow Velocity
14%
Protective Coating
14%
Blood Plasma
14%