Abstract
In this paper, improved electrical and optical properties of aluminum gallium nitride (AlGaN)-based ultraviolet light-emitting diodes using fluorine-doped indium tin oxide (F-ITO) electrodes are reported. F-doping was found to increase the work function as well as the energy bandgap of the ITO and, thereby, reduce the Shottky barrier height in contact with p-(Al)GaN. As a result, the optical transmittance increased from 79.7 to 86.9 at 380 nm, while the specific contact resistance decreased from 1.04 10 -3 cm 2 to 9.12 10 -4 cm 2 after F-doping, which led to an increase in the output power from 2.41 mW to 5.99 mW.
Original language | English |
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Article number | 081110 |
Journal | Applied Physics Letters |
Volume | 100 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2012 Feb 20 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)