Abstract
We fabricated InAs self-assembled quantum dots (QDs) on strained layer using molecular beam epitaxy. The strained layer consisted of InAs/GaAs superlattice(SL) and GaAs barrier layer on (001) GaAs substrate. Through controlling thickness of the strained layer, we formed two-dimensional alignments of QDs on misfit dislocation arrays along 〈110〉 directions made by strained layer. The increase of the strained layer thickness resulted in a stronger alignment of QDs, which were observed by atomic force microscopy studies. The aligned QDs were confirmed to confine carriers well and have different size distributions by photoluminescence measurement.
Original language | English |
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Pages (from-to) | 147-152 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 618 |
DOIs | |
Publication status | Published - 2000 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering