All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim; Suk Ho Cho; Young Woo Ok; Tae Yeon Seong; Young Soo Yoon

doi:10.1116/1.1565348

All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim, Suk Ho Cho, Young Woo Ok, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	949-952
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	3
DOIs	https://doi.org/10.1116/1.1565348
Publication status	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1565348

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author = "Kim, {Han Ki} and Cho, {Suk Ho} and Ok, {Young Woo} and Seong, {Tae Yeon} and Yoon, {Young Soo}",

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AU - Kim, Han Ki

AU - Cho, Suk Ho

AU - Ok, Young Woo

AU - Seong, Tae Yeon

AU - Yoon, Young Soo

PY - 2003

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All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

ASJC Scopus subject areas

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