@article{98934e4767374e6285372576ee438b25,
title = "All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes",
author = "Kim, {Han Ki} and Cho, {Suk Ho} and Ok, {Young Woo} and Seong, {Tae Yeon} and Yoon, {Young Soo}",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2003",
doi = "10.1116/1.1565348",
language = "English",
volume = "21",
pages = "949--952",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "3",
}