Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

J. S. Lee; B. Min; K. Cho; S. Kim; J. Park; Y. T. Lee; N. S. Kim; M. S. Lee; S. O. Park; J. T. Moon

doi:10.1016/S0022-0248(03)01203-X

Al₂O₃ nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

J. S. Lee, B. Min, K. Cho, S. Kim, J. Park, Y. T. Lee, N. S. Kim, M. S. Lee, S. O. Park, J. T. Moon

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

87 Citations (Scopus)

Abstract

Aluminum oxide (Al₂O₃) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). Al₂O₃ material was deposited on the MWNTs at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous Al₂O₃ material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.

Original language	English
Pages (from-to)	443-448
Number of pages	6
Journal	Journal of Crystal Growth
Volume	254
Issue number	3-4
DOIs	https://doi.org/10.1016/S0022-0248(03)01203-X
Publication status	Published - 2003 Jul

Keywords

A1. Coating
A1. Filling
A3. Atomic layer deposition
B1. AlO nanotube
B1. CNT

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

Access to Document

10.1016/S0022-0248(03)01203-X

Cite this

@article{50f80804abf34719af5b211b8dbcd2b6,

title = "Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition",

abstract = "Aluminum oxide (Al2O3) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). Al2O3 material was deposited on the MWNTs at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous Al2O3 material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.",

keywords = "A1. Coating, A1. Filling, A3. Atomic layer deposition, B1. AlO nanotube, B1. CNT",

author = "Lee, {J. S.} and B. Min and K. Cho and S. Kim and J. Park and Lee, {Y. T.} and Kim, {N. S.} and Lee, {M. S.} and Park, {S. O.} and Moon, {J. T.}",

note = "Funding Information: This work was supported by the Korean Ministry of Science and Technology as a part of the {\textquoteleft}02 Nuclear R&D Program, Grant No. R01-2002-000-0(2002) from the Basic Research Program of the Korea Science & Engineering Foundation, and National R&D project for nanoscience and technology. ",

year = "2003",

month = jul,

doi = "10.1016/S0022-0248(03)01203-X",

language = "English",

volume = "254",

pages = "443--448",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

AU - Lee, J. S.

AU - Min, B.

AU - Cho, K.

AU - Kim, S.

AU - Park, J.

AU - Lee, Y. T.

AU - Kim, N. S.

AU - Lee, M. S.

AU - Park, S. O.

AU - Moon, J. T.

N1 - Funding Information: This work was supported by the Korean Ministry of Science and Technology as a part of the ‘02 Nuclear R&D Program, Grant No. R01-2002-000-0(2002) from the Basic Research Program of the Korea Science & Engineering Foundation, and National R&D project for nanoscience and technology.

PY - 2003/7

Y1 - 2003/7

N2 - Aluminum oxide (Al2O3) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). Al2O3 material was deposited on the MWNTs at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous Al2O3 material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.

AB - Aluminum oxide (Al2O3) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). Al2O3 material was deposited on the MWNTs at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous Al2O3 material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.

KW - A1. Coating

KW - A1. Filling

KW - A3. Atomic layer deposition

KW - B1. AlO nanotube

KW - B1. CNT

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U2 - 10.1016/S0022-0248(03)01203-X

DO - 10.1016/S0022-0248(03)01203-X

M3 - Article

AN - SCOPUS:0038485765

SN - 0022-0248

VL - 254

SP - 443

EP - 448

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 3-4

ER -