An electrostatic micromechanical biosensor for electrical detection of label-free DNA

Ji Min Choi, Sung Up Hwang, Chang Hoon Kim, Hyun Ho Yang, Cheulhee Jung, Hyun Gyu Park, Jun Bo Yoon, Yang Kyu Choi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


An electrostatic micromechanical biosensor is demonstrated for the label-free electrical detection of DNA, based on electrostatic actuation of a double-clamped micromechanical cantilever by driving gate electrodes to establish a current path through drain and source electrodes. Intrinsic charges in DNA alter surface charges on the gate by pre-charging concept and change the pull-in voltage (V PI), the voltage required to bring the suspended cantilever into contact with the drain electrode by induced electrostatic force. Its operation principle is verified by a numerical simulation and a capacitive model. The proposed biosensor represents a breakthrough for practical exploitation of electro-mechanical based sensors.

Original languageEnglish
Article number163701
JournalApplied Physics Letters
Issue number16
Publication statusPublished - 2012 Apr 16
Externally publishedYes

Bibliographical note

Funding Information:
This research was supported by the National Research and Development Program (NRDP, 2011-0002182) for the development of biomedical function monitoring biosensors and a grant from the National Research Foundation of Korea (NRF) funded by the Korean Ministry of Education, Science and Technology (MEST) (No. 2011-0020487). This work was also supported by the Smart IT Convergence System Research Center funded by the MEST (SIRC-2011-0031845).

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


Dive into the research topics of 'An electrostatic micromechanical biosensor for electrical detection of label-free DNA'. Together they form a unique fingerprint.

Cite this