An electrostatic micromechanical biosensor is demonstrated for the label-free electrical detection of DNA, based on electrostatic actuation of a double-clamped micromechanical cantilever by driving gate electrodes to establish a current path through drain and source electrodes. Intrinsic charges in DNA alter surface charges on the gate by pre-charging concept and change the pull-in voltage (V PI), the voltage required to bring the suspended cantilever into contact with the drain electrode by induced electrostatic force. Its operation principle is verified by a numerical simulation and a capacitive model. The proposed biosensor represents a breakthrough for practical exploitation of electro-mechanical based sensors.
Bibliographical noteFunding Information:
This research was supported by the National Research and Development Program (NRDP, 2011-0002182) for the development of biomedical function monitoring biosensors and a grant from the National Research Foundation of Korea (NRF) funded by the Korean Ministry of Education, Science and Technology (MEST) (No. 2011-0020487). This work was also supported by the Smart IT Convergence System Research Center funded by the MEST (SIRC-2011-0031845).
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)