An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo; Jinsik Kim; Kyung Woon Lee; Dong Ho Lee; Hyun Joon Shin; Jung Ho Park

doi:10.1016/j.cap.2014.04.016

An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo, Jinsik Kim, Kyung Woon Lee, Dong Ho Lee, Hyun Joon Shin, Jung Ho Park

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

Original language	English
Pages (from-to)	954-959
Number of pages	6
Journal	Current Applied Physics
Volume	14
Issue number	7
DOIs	https://doi.org/10.1016/j.cap.2014.04.016
Publication status	Published - 2014 Jul

Bibliographical note

Funding Information:
This work was supported by a Seoul R&BD Program ( WR080951 ). This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Korean Government ( 2010-0013097 ).

Keywords

DNA
Integrated Mach-Zehnder interferometric biochip
Plasma-enhanced chemical vapor deposition
Silicon oxynitride layers

ASJC Scopus subject areas

General Materials Science
General Physics and Astronomy

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10.1016/j.cap.2014.04.016

Cite this

@article{6f8b32cb0c124a7ca1881a15ee938c1f,

title = "An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition",

abstract = "We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.",

keywords = "DNA, Integrated Mach-Zehnder interferometric biochip, Plasma-enhanced chemical vapor deposition, Silicon oxynitride layers",

author = "Choo, {Sung Joong} and Jinsik Kim and Lee, {Kyung Woon} and Lee, {Dong Ho} and Shin, {Hyun Joon} and Park, {Jung Ho}",

note = "Funding Information: This work was supported by a Seoul R&BD Program ( WR080951 ). This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Korean Government ( 2010-0013097 ).",

year = "2014",

month = jul,

doi = "10.1016/j.cap.2014.04.016",

language = "English",

volume = "14",

pages = "954--959",

journal = "Current Applied Physics",

issn = "1567-1739",

publisher = "Elsevier B.V.",

number = "7",

}

TY - JOUR

T1 - An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

AU - Choo, Sung Joong

AU - Kim, Jinsik

AU - Lee, Kyung Woon

AU - Lee, Dong Ho

AU - Shin, Hyun Joon

AU - Park, Jung Ho

N1 - Funding Information: This work was supported by a Seoul R&BD Program ( WR080951 ). This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Korean Government ( 2010-0013097 ).

PY - 2014/7

Y1 - 2014/7

N2 - We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

AB - We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

KW - DNA

KW - Integrated Mach-Zehnder interferometric biochip

KW - Plasma-enhanced chemical vapor deposition

KW - Silicon oxynitride layers

UR - http://www.scopus.com/inward/record.url?scp=84901392681&partnerID=8YFLogxK

U2 - 10.1016/j.cap.2014.04.016

DO - 10.1016/j.cap.2014.04.016

M3 - Article

AN - SCOPUS:84901392681

SN - 1567-1739

VL - 14

SP - 954

EP - 959

JO - Current Applied Physics

JF - Current Applied Physics

IS - 7

ER -

An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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