An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo, Jinsik Kim, Kyung Woon Lee, Dong Ho Lee, Hyun Joon Shin, Jung Ho Park

    Research output: Contribution to journal › Article › peer-review

    10 Citations (Scopus)

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    Engineering

    Material Science

    Physics

    Chemical Engineering