An intelligent virtual metrology system with adaptive update for semiconductor manufacturing

Mathematics

• Semiconductor Manufacturing 100%
• Metrology 85%
• Update 57%
• Prediction Model 34%
• Wafer 32%
• Experimental Validation 8%
• Prediction 8%
• Reliability Estimation 7%
• Artificial Neural Network 6%
• Quality Control 6%
• Manufacturing 5%
• High Accuracy 5%
• Trade-offs 5%
• Ensemble 5%
• Influence 4%
• Costs 3%
• Relationships 3%
• Demonstrate 3%
• Performance 3%
• Model 1%

Engineering & Materials Science

• Adaptive systems 64%
• Semiconductor materials 52%
• Quality control 5%
• Costs 4%
• Neural networks 3%