Analysis of laser-induced damage during laser ablation process using picosecond pulse width laser to fabricate highly efficient PERC cells

Myungsu Kim, Donghwan Kim, Dongseop Kim, Yoon Mook Kang

    Research output: Contribution to journalArticlepeer-review

    15 Citations (Scopus)

    Abstract

    A highly efficient passivated emitter and rear cell(PERC) was fabricated using a picosecond (ps) pulse width laser ablation system. To evaluate the applicability of the laser ablation process to remove dielectric layers, the laser-induced damage was thoroughly analyzed using TEM and Raman spectroscopy. At the optimized laser intensity, passivation layers such as SiNx and Al2O3 were well ablated and laser damage was suppressed. In this case, only a thin layer of amorphous silicon of 30 Å in thickness was formed but recrystallized domains or dislocations were not observed underneath the processed region. At excessive irradiation powers, the dislocation density significantly increased under the ablated spot. As a result, as the laser irradiation energy increased from 3.2W to 9.6W, the cell efficiency linearly decreased from 19.35% to 19.04%.

    Original languageEnglish
    Pages (from-to)101-106
    Number of pages6
    JournalSolar Energy
    Volume108
    DOIs
    Publication statusPublished - 2014 Oct

    Bibliographical note

    Funding Information:
    This work was supported by the National Research Foundation of Korea Grant funded by the Korean Government (MSIP) (2014, University-Institute cooperation program); by World Class 300 Project R&D ( No. 10043264 ) of the Korea Evaluation Institute of Industrial Technology (KEIT) grant funded by the Korea government Ministry of Trade, Industry and Energy.

    Keywords

    • C-Si solar cell
    • High efficiency solar cell
    • Laser ablation
    • Rear local contact

    ASJC Scopus subject areas

    • Renewable Energy, Sustainability and the Environment
    • General Materials Science

    Fingerprint

    Dive into the research topics of 'Analysis of laser-induced damage during laser ablation process using picosecond pulse width laser to fabricate highly efficient PERC cells'. Together they form a unique fingerprint.

    Cite this