Analysis of Parameters Affecting the Surface Roughness in Sapphire Wafer Polishing Using Nanocrystalline–Microcrystalline Multilayer Diamond CVD Pellets

Joong Cheul Yun, Eung seok Lee, Choong hyun Lee, Young kyun Lim, Dae Soon Lim

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

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Engineering & Materials Science