Analysis of tiny piezoelectric ultrasonic linear motor

Hyun Phill Ko, Kyong Jae Lee, Kyoung Ho Yoo, Chong Yun Kang, Sangsig Kim, Seok Jin Yoon

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)


A modified structure for tiny ultrasonic linear motors has been developed, and various shaft materials have been tested in order to improve dynamic properties. The shaft material has a direct influence on efficiency, reliability, and quality of the motors and their dynamic properties. The shaft material is crucial to achieve high performance. Shafts of with various materials, such as a stainless steel, stainless steel coated with diamond like carbon (DLC), a Pyrex, and a graphite, can make it possible to improve dynamic properties of the motors over a wide range of tribological conditions. For the motor with a stainless steel shaft coated with DLC at 47 kHz, its velocity is 6.5 mm/s and its force is 110 mN. When the motor has a Pyrex shaft, a force of 140mN is reached at 52kHz. Accordingly, the maximum force produced by a motor with a graphite shaft is estimated as 97 mN. The velocity of this motor was 15 mm/s. We found that graphite has a fine surface and a directional texture which can help a moving element achieve linear motion. Finally, the use of a cap resulted in significantly improving stable operation. A motor with a graphite or a Pyrex shaft showed very stable operation and improved dynamic characteristics.

Original languageEnglish
Pages (from-to)4782-4786
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number5 B
Publication statusPublished - 2006 May 25


  • Actuating force
  • Linear motor
  • Piezoelectric motor
  • Radial mode
  • Velocity

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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