Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process

  • Sun Woo Kim
  • , Hwan Jun Zang
  • , June Park
  • , Gwang Sik Kim
  • , Hyun Yong Yu
  • , Minwoo Ha
  • , Kyungbo Ko
  • , Sang Soo Park
  • , Choon Hwan Kim

    Research output: Contribution to journal › Article › peer-review

    2 Citations (Scopus)

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    Material Science