Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process

Sun Woo Kim, Hwan Jun Zang, June Park, Gwang Sik Kim, Hyun Yong Yu, Minwoo Ha, Kyungbo Ko, Sang Soo Park, Choon Hwan Kim

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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Material Science