Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process
- Sun Woo Kim
- , Hwan Jun Zang
- , June Park
- , Gwang Sik Kim
- , Hyun Yong Yu
- , Minwoo Ha
- , Kyungbo Ko
- , Sang Soo Park
- , Choon Hwan Kim
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)