Anomaly detection using signal segmentation and one-class classification in diffusion process of semiconductor manufacturing

Keyphrases

• Anomaly Detection 100%
• Diffusion Process 100%
• One-class Classification 100%
• Semiconductor Manufacturing 100%
• Abnormal Data 100%
• Fault Classification 100%
• Signal Segmentation 100%
• Classification Performance 66%
• Fault Detection Rate 66%
• Segmentation Feature Extraction 66%
• Step Signal 66%
• Time Series Data 33%
• Classification Algorithms 33%
• Sensor Signals 33%
• Classification Model 33%
• Subtle Differences 33%
• Fault Detection 33%
• General Classification 33%
• New Diagnostic Method 33%
• Finished Product 33%
• Local Outlier Factor 33%
• Time Series Classification 33%
• Isolation Forest Algorithm 33%

Engineering

• Diffusion Process 100%
• Anomaly Detection 100%
• Semiconductor Manufacturing 100%
• Classification Performance 66%
• Detection Performance 66%
• Feature Extraction 33%
• Sensor Signal 33%
• Based Feature Extraction 33%
• Classification Algorithm 33%
• Data Series 33%