TY - JOUR
T1 - Application-related properties of giant magnetostrictive thin films
AU - Lim, S. H.
AU - Kim, H. J.
AU - Na, S. M.
AU - Suh, S. J.
N1 - Funding Information:
SHL thanks Research Center for Advanced Magnetic Materials (an ERC at Chungnam National University) for its financial support to this work. The authors wish to thank Drs. Y.S. Choi (Hankook Core, Korea), J.M. Jung (Samsung Electro-mechanics, Korea), and T. Shima (Tohoku University, Japan) for their help in experiments.
PY - 2002/2
Y1 - 2002/2
N2 - In an effort to facilitate the utilization of giant magnetostrictive thin films in microdevices, application-related properties of these thin films, which include induced anisotropy, residual stress and corrosion properties, are investigated. A large induced anisotropy with an energy of 6 × 104 J/m3 is formed in field-sputtered amorphous Sm-Fe-B thin films, resulting in a large magnetostriction anisotropy. Two components of residual stress, intrinsic compressive stress and tensile stress due to the difference of the thermal expansion coefficients between the substrate and thin film, are identified. The variation of residual stress with fabrication parameter and annealing temperature, and its influence on mechanical bending and magnetic properties are examined. Better corrosion properties are observed in Sm-Fe thin films than in Tb-Fe. Corrosion properties of Tb-Fe thin films, however, are much improved with the introduction of nitrogen to the thin films without deteriorating magnetostrictive properties.
AB - In an effort to facilitate the utilization of giant magnetostrictive thin films in microdevices, application-related properties of these thin films, which include induced anisotropy, residual stress and corrosion properties, are investigated. A large induced anisotropy with an energy of 6 × 104 J/m3 is formed in field-sputtered amorphous Sm-Fe-B thin films, resulting in a large magnetostriction anisotropy. Two components of residual stress, intrinsic compressive stress and tensile stress due to the difference of the thermal expansion coefficients between the substrate and thin film, are identified. The variation of residual stress with fabrication parameter and annealing temperature, and its influence on mechanical bending and magnetic properties are examined. Better corrosion properties are observed in Sm-Fe thin films than in Tb-Fe. Corrosion properties of Tb-Fe thin films, however, are much improved with the introduction of nitrogen to the thin films without deteriorating magnetostrictive properties.
KW - Application-related properties
KW - Corrosion properties
KW - Giant magnetostriction
KW - Induced anisotropy
KW - Residual stress
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=0036465776&partnerID=8YFLogxK
U2 - 10.1016/S0304-8853(01)00660-6
DO - 10.1016/S0304-8853(01)00660-6
M3 - Article
AN - SCOPUS:0036465776
SN - 0304-8853
VL - 239
SP - 546
EP - 550
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
IS - 1-3
ER -