Array of luminescent Er-doped Si nanodots fabricated by pulsed laser deposition

Seung Min Park, Chang Hyun Bae, Woosung Nam, Sung Chan Park, Jeong Sook Ha

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20 Citations (Scopus)


Ordered arrays of Er-doped Si nanodots were fabricated by pulsed laser deposition using an anodic aluminum oxide (AAO) nanopore membrane. Er-doped Si (Si:Er) nanodots with an average diameter of 60-80 nm and a periodicity of 100 nm were uniformly assembled into hexagonally ordered nanopores of AAO membrane. Photoluminescence (PL) spectra taken from Si:Er nanodots showed an emission peak at 1.54 μm, which is due to intra- 4f shell transition (I 132 4 → I 152 4) of Er3+ ions. Postannealing of nanodot arrays up to 500 °C resulted in the enhancement of PL intensities without enlargement or aggregation of the nanodots.

Original languageEnglish
Article number023104
Pages (from-to)023104-1-023104-3
JournalApplied Physics Letters
Issue number2
Publication statusPublished - 2005 Jan 10

Bibliographical note

Funding Information:
This work was supported by the National R & D Project for Nano Science and Technology (Grant No. M10213120001-02B1512-00310) and the Basic Research Program of Korea Science and Engineering Foundation (Grant No. R01-2003-000-10019-0).

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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