Assessment of the (010) β-Ga₂O₃surface and substrate specification

Engineering & Materials Science

• Crystal growth 49%
• Crystal structure 44%
• Epitaxial growth 49%
• Gallium 49%
• Metallorganic chemical vapor deposition 55%
• Molecular beam epitaxy 54%
• Oxides 30%
• Probability density function 33%
• Specifications 67%
• Substrates 74%

Physics & Astronomy

• commercialization 45%
• crystal growth 32%
• crystal structure 27%
• epitaxy 34%
• flat surfaces 31%
• gallium oxides 44%
• metalorganic chemical vapor deposition 33%
• molecular beam epitaxy 29%
• recommendations 37%
• ridges 69%
• specifications 100%

Chemical Compounds

• Beta Phase 40%
• Chemical Vapour Deposition 31%
• Crystal Growth 34%
• Crystal Structure 17%
• Density Functional Theory 21%
• Epitaxial Growth 42%
• Liquid Film 16%
• Molecular Beam Epitaxy 50%
• Oxide 18%
• Surface 33%