Atomic layer deposition of ruthenium on plasma-treated vertically aligned carbon nanotubes for high-performance ultracapacitors

Jun Woo Kim, Byungwoo Kim, Suk Won Park, Woong Kim, Joon Hyung Shim

    Research output: Contribution to journalArticlepeer-review

    13 Citations (Scopus)

    Abstract

    It is challenging to realize a conformal metal coating by atomic layer deposition (ALD) because of the high surface energy of metals. In this study, ALD of ruthenium (Ru) on vertically aligned carbon nanotubes (CNTs) was carried out. To activate the surface of CNTs that lack surface functional groups essential for ALD, oxygen plasma was applied ex situ before ALD. X-ray photoelectron spectroscopy and Raman spectroscopy confirmed surface activation of CNTs by the plasma pretreatment. Transmission electron microscopy analysis with energy-dispersive x-ray spectroscopy composition mapping showed that ALD Ru grew conformally along CNTs walls. ALD Ru/CNTs were electrochemically oxidized to ruthenium oxide (RuOx) that can be a potentially useful candidate for use in the electrodes of ultracapacitors. Electrode performance of RuOx/CNTs was evaluated using cyclic voltammetry and galvanostatic charge-discharge measurements.

    Original languageEnglish
    Article number435404
    JournalNanotechnology
    Volume25
    Issue number43
    DOIs
    Publication statusPublished - 2014 Oct 31

    Bibliographical note

    Publisher Copyright:
    © 2014 IOP Publishing Ltd.

    Keywords

    • atomic layer deposition
    • carbon nanotubes
    • ultracapacitors

    ASJC Scopus subject areas

    • Bioengineering
    • General Chemistry
    • General Materials Science
    • Mechanics of Materials
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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