Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery

H. Y. Park; S. R. Lee; Y. J. Lee; B. W. Cho; W. I. Cho

doi:10.1016/j.matchemphys.2005.02.024

Bias sputtering and characterization of LiCoO₂ thin film cathodes for thin film microbattery

H. Y. Park, S. R. Lee, Y. J. Lee, B. W. Cho, W. I. Cho

Research output: Contribution to journal › Article › peer-review

49 Citations (Scopus)

Abstract

LiCoO₂ thin films, which could be used as a cathode material in microbatteries, have been deposited by radio-frequency (rf) magnetron sputtering with various substrate biases as process parameter. The substrate bias during deposition has influenced the electrochemical properties of thin film electrode, and it could be found by charge-discharge test and cyclic voltammogram. We could obtain LiCoO₂ thin film cathodes, which can be used directly, without annealing, for the complete thin film battery. The variations of electrochemical properties with substrate bias are related to micro-structural changes due to the ion bombardment, which delivers energy to the growing film. The bias sputtering of LiCoO₂ is suggested as the promising method to fabricate thin film microbatteries.

Original language	English
Pages (from-to)	70-78
Number of pages	9
Journal	Materials Chemistry and Physics
Volume	93
Issue number	1
DOIs	https://doi.org/10.1016/j.matchemphys.2005.02.024
Publication status	Published - 2005 Sept 15

Keywords

Bias sputtering
Cathode
LiCoO
Microbattery
Thin film
Thin film battery

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics

Access to Document

10.1016/j.matchemphys.2005.02.024

Cite this

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title = "Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery",

abstract = "LiCoO2 thin films, which could be used as a cathode material in microbatteries, have been deposited by radio-frequency (rf) magnetron sputtering with various substrate biases as process parameter. The substrate bias during deposition has influenced the electrochemical properties of thin film electrode, and it could be found by charge-discharge test and cyclic voltammogram. We could obtain LiCoO2 thin film cathodes, which can be used directly, without annealing, for the complete thin film battery. The variations of electrochemical properties with substrate bias are related to micro-structural changes due to the ion bombardment, which delivers energy to the growing film. The bias sputtering of LiCoO2 is suggested as the promising method to fabricate thin film microbatteries.",

keywords = "Bias sputtering, Cathode, LiCoO, Microbattery, Thin film, Thin film battery",

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AU - Park, H. Y.

AU - Lee, S. R.

AU - Lee, Y. J.

AU - Cho, B. W.

AU - Cho, W. I.

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AB - LiCoO2 thin films, which could be used as a cathode material in microbatteries, have been deposited by radio-frequency (rf) magnetron sputtering with various substrate biases as process parameter. The substrate bias during deposition has influenced the electrochemical properties of thin film electrode, and it could be found by charge-discharge test and cyclic voltammogram. We could obtain LiCoO2 thin film cathodes, which can be used directly, without annealing, for the complete thin film battery. The variations of electrochemical properties with substrate bias are related to micro-structural changes due to the ion bombardment, which delivers energy to the growing film. The bias sputtering of LiCoO2 is suggested as the promising method to fabricate thin film microbatteries.

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