Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery

  • H. Y. Park*
  • , S. R. Lee
  • , Y. J. Lee
  • , B. W. Cho
  • , W. I. Cho
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    51 Citations (Scopus)

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    Material Science