Abstract
A wafer bin map (WBM), which is the result of an electrical die-sorting test, provides information on which bins failed what tests, and plays an important role in finding defective wafer patterns in semiconductor manufacturing. Current wafer inspection based on WBM has two problems: good/bad WBM classification is performed by engineers and the bin code coloring scheme does not reflect the relationship between bin codes. To solve these problems, we propose a neural network-based bin coloring method called Bin2Vec to make similar bin codes are represented by similar colors. We also build a convolutional neural network-based WBM classification model to reduce the variations in the decisions made by engineers with different expertise by learning the company-wide historical WBM classification results. Based on a real dataset with a total of 27,701 WBMs, our WBM classification model significantly outperformed benchmarked machine learning models. In addition, the visualization results of the proposed Bin2Vec method makes it easier to discover meaningful WBM patterns compared with the random RGB coloring scheme. We expect the proposed framework to improve both efficiencies by automating the bad wafer classification process and effectiveness by assigning similar bin codes and their corresponding colors on the WBM.
Original language | English |
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Article number | 597 |
Journal | Applied Sciences (Switzerland) |
Volume | 9 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2019 Feb 11 |
Bibliographical note
Funding Information:Funding: This research was supported by Basic Science Research Pro-gram through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2016R1D1A1B03930729) and Institute for Information & Communications Technology Promotion (IITP) grant funded by the Korea government (MSIP) (No. 2017-0-00349, Development of Media Streaming system with Machine Learning using QoE (Quality of Experience)). This work was also supported by Korea Electric Power Corporation (Grant number: R18XA05).
Funding Information:
This research was supported by Basic Science Research Pro-gram through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2016R1D1A1B03930729) and Institute for Information & Communications Technology Promotion (IITP) grant funded by the Korea government (MSIP) (No. 2017-0-00349, Development of Media Streaming system with Machine Learning using QoE (Quality of Experience)). This work was also supported by Korea Electric Power Corporation (Grant number: R18XA05).
Publisher Copyright:
© 2019 by the authors.
Keywords
- Bad wafer classification
- Bin2Vec
- Convolution neural network
- Wafer bin map (WBM)
- Word2Vec
ASJC Scopus subject areas
- General Materials Science
- Instrumentation
- General Engineering
- Process Chemistry and Technology
- Computer Science Applications
- Fluid Flow and Transfer Processes