Biodegradable, flexible silicon nanomembrane-based NOx gas sensor system with record-high performance for transient environmental monitors and medical implants

Gwan Jin Ko, Soo Deok Han, Jeong Ki Kim, Jia Zhu, Won Bae Han, Jinmook Chung, Seung Min Yang, Huanyu Cheng, Dong Hwee Kim, Chong Yun Kang, Suk Won Hwang

    Research output: Contribution to journalArticlepeer-review

    58 Citations (Scopus)

    Abstract

    A novel transient electronics technology that is capable of completely dissolving or decomposing in certain conditions after a period of operation offers unprecedented opportunities for medical implants, environmental sensors, and other applications. Here, we describe a biodegradable, flexible silicon-based electronic system that detects NO species with a record-breaking sensitivity of 136 Rs (5 ppm, NO2) and 100-fold selectivity for NO species over other substances with a fast response (~30 s) and recovery (~60 s). The exceptional features primarily depend on not only materials, dimensions, and design layouts but also temperatures and electrical operations. Large-scale sensor arrays in a mechanically pliable configuration exhibit negligible deterioration in performance under various modes of applied loads, consistent with mechanics modeling. In vitro evaluations demonstrate the capability and stability of integrated NOx devices in severe wet environments for biomedical applications.

    Original languageEnglish
    Article number71
    JournalNPG Asia Materials
    Volume12
    Issue number1
    DOIs
    Publication statusPublished - 2020 Dec 1

    Bibliographical note

    Publisher Copyright:
    © 2020, The Author(s).

    ASJC Scopus subject areas

    • Modelling and Simulation
    • General Materials Science
    • Condensed Matter Physics

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