Abstract
Dense SiC layers with a thickness of 150 nm were prepared on n- and p-type Si substrates using aerosol deposition (AD) at room temperature. The contribution of electrons and holes to the conductivity in Ni/i-SiC/Si structures was investigated by conducting experiments involving the injection of carriers from silicon. Our results showed that the injection of carriers via light illumination and temperature experiments led to the generation of minority carriers, which contributed to the conductivity in the Ni/i-SiC/Si structures. The activation energies were found to be 0.8 eV and 0.4 eV for i-SiC/n-Si and i-SiC/p-Si, respectively. The conductivity of these Ni/i-SiC/Si structures was also affected by the trap-assisted tunneling process. The results indicate that the AD-prepared SiC/Si heterostructures could possibly be used to control bipolar conductivity and hold potential for application in temperature sensors and photovoltaics.
Original language | English |
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Pages (from-to) | 17556-17561 |
Number of pages | 6 |
Journal | Ceramics International |
Volume | 45 |
Issue number | 14 |
DOIs | |
Publication status | Published - 2019 Oct 1 |
Bibliographical note
Funding Information:The research was funded by a Research Grant from Kwangwoon University in 2019. Additionally, this work was supported by the High Level Track of Power Semiconductor Technology for Renewable Energy and Electrical Vehicle (No. 20174010201290 ) of the Korea Institute of Energy Technology Evaluation and Planning .
Publisher Copyright:
© 2019 Elsevier Ltd and Techna Group S.r.l.
Keywords
- Aerosol deposition
- Bipolar conductivity
- Heterostructure
- Silicon carbide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Materials Chemistry