Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

Jea Shik Shin; Insang Song; Moon Chul Lee; Chul Soo Kim; Sang Uk Son; Duck Hwan Kim; Ho Soo Park; Jing Cui; Yujie Ai; Sungwoo Hwang; Jae Sung Rieh

doi:10.1587/elex.11.20130938

Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

Jea Shik Shin, Insang Song, Moon Chul Lee, Chul Soo Kim, Sang Uk Son, Duck Hwan Kim, Ho Soo Park, Jing Cui, Yujie Ai, Sungwoo Hwang, Jae Sung Rieh

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Q_a) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt²), which is essential to achieve wide band-width of RF filters, is 6.54%.

Original language	English
Article number	20130938
Journal	ieice electronics express
Volume	11
Issue number	6
DOIs	https://doi.org/10.1587/elex.11.20130938
Publication status	Published - 2014 Mar 6

Keywords

BAW
FBAR
Q-factors
RF resonator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1587/elex.11.20130938

Cite this

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title = "Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure",

abstract = "A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.",

keywords = "BAW, FBAR, Q-factors, RF resonator",

author = "Shin, {Jea Shik} and Insang Song and Lee, {Moon Chul} and Kim, {Chul Soo} and Son, {Sang Uk} and Kim, {Duck Hwan} and Park, {Ho Soo} and Jing Cui and Yujie Ai and Sungwoo Hwang and Rieh, {Jae Sung}",

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doi = "10.1587/elex.11.20130938",

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T1 - Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

AU - Shin, Jea Shik

AU - Song, Insang

AU - Lee, Moon Chul

AU - Kim, Chul Soo

AU - Son, Sang Uk

AU - Kim, Duck Hwan

AU - Park, Ho Soo

AU - Cui, Jing

AU - Ai, Yujie

AU - Hwang, Sungwoo

AU - Rieh, Jae Sung

PY - 2014/3/6

Y1 - 2014/3/6

N2 - A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.

AB - A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04 dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.

KW - BAW

KW - FBAR

KW - Q-factors

KW - RF resonator

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DO - 10.1587/elex.11.20130938

M3 - Article

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SN - 1349-2543

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Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

Abstract

Keywords

ASJC Scopus subject areas

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