Bulk acoustic wave resonators of low lateral energy leakage using air edge reflector

Jea Shik Shin, Insang Song, Moonchul Lee, Hosoo Park, Sang Uk Son, Chul Soo Kim, Duck Hwan Kim, Jing Cui, Sung Woo Hwang, Jae Sung Rieh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


A novel bulk acoustic wave (BAW) resonator structure with air edge reflectors is proposed. The air reflectors provided at the border of the resonator suppress the acoustic wave leakage travelling in lateral direction. The difference of acoustic impedance at the air edge interface is so large that the reflectivity is almost unity which indicates perfect reflection. As a result of optimized lateral structure, the Q-factor at antiresonance frequency (Qa) is improved significantly to 2740. Furthermore, the effective electro-mechanical coupling coefficient (kt 2) which is essential to achieve wide band-width of RF filters is increased considerably by 14%. We also perform multi-physics simulation and investigate the effect of the lateral wave leakage for the BAW structures.

Original languageEnglish
Title of host publicationIMS 2012 - 2012 IEEE MTT-S International Microwave Symposium
Publication statusPublished - 2012
Event2012 IEEE MTT-S International Microwave Symposium, IMS 2012 - Montreal, QC, Canada
Duration: 2012 Jun 172012 Jun 22

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X


Other2012 IEEE MTT-S International Microwave Symposium, IMS 2012
CityMontreal, QC


  • Acoustic devices
  • Film bulk acoustic wave resonator
  • Microelectromechanical devices
  • Rf filters

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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