Bulk acoustic wave resonators of low lateral energy leakage using air edge reflector

Jea Shik Shin, Insang Song, Moonchul Lee, Hosoo Park, Sang Uk Son, Chul Soo Kim, Duck Hwan Kim, Jing Cui, Sung Woo Hwang, Jae Sung Rieh

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    A novel bulk acoustic wave (BAW) resonator structure with air edge reflectors is proposed. The air reflectors provided at the border of the resonator suppress the acoustic wave leakage travelling in lateral direction. The difference of acoustic impedance at the air edge interface is so large that the reflectivity is almost unity which indicates perfect reflection. As a result of optimized lateral structure, the Q-factor at antiresonance frequency (Qa) is improved significantly to 2740. Furthermore, the effective electro-mechanical coupling coefficient (kt 2) which is essential to achieve wide band-width of RF filters is increased considerably by 14%. We also perform multi-physics simulation and investigate the effect of the lateral wave leakage for the BAW structures.

    Original languageEnglish
    Title of host publicationIMS 2012 - 2012 IEEE MTT-S International Microwave Symposium
    DOIs
    Publication statusPublished - 2012
    Event2012 IEEE MTT-S International Microwave Symposium, IMS 2012 - Montreal, QC, Canada
    Duration: 2012 Jun 172012 Jun 22

    Publication series

    NameIEEE MTT-S International Microwave Symposium Digest
    ISSN (Print)0149-645X

    Other

    Other2012 IEEE MTT-S International Microwave Symposium, IMS 2012
    Country/TerritoryCanada
    CityMontreal, QC
    Period12/6/1712/6/22

    Keywords

    • Acoustic devices
    • Film bulk acoustic wave resonator
    • Microelectromechanical devices
    • Rf filters

    ASJC Scopus subject areas

    • Radiation
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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