Ceramics used as intermetallic diffusion barriers in Pd-based composite membranes sputtered on porous nickel supports

Chun Boo Lee, Sung Wook Lee, Jong Soo Park, Shin Kun Ryi, Dong Wook Lee, Kyung Ran Hwang, Sung Hyun Kim

Research output: Contribution to journalReview articlepeer-review

26 Citations (Scopus)


A ceramic barrier was introduced onto the surface of a porous nickel support (PNS) to prevent intermetallic diffusion. Al2O3 and ZrO2 were deposited on the PNS by RF sputtering to a thickness of 200 nm. Pd and Au were then deposited by DC and RF sputtering with thicknesses of 3 μm and 0.5 μm, respectively, on the PNS with the diffusion barrier. The permeation measurement was carried out using hydrogen and helium at 723 K and a pressure difference of 100-2000 kPa. The gas permeation tests confirmed that the hydrogen permeation flux increased with increasing pressure difference and reached 4.07 mol m-2 s-1 at 2000 kPa with an H 2/He selectivity of more than 5000. The ZrO2 barrier membrane provided a flux of 1.5 times higher than that achieved by the Al 2O3 barrier membrane. The sputtering method was successful in depositing intermetallic diffusion barriers and Pd-Au alloy layers.

Original languageEnglish
Pages (from-to)425-430
Number of pages6
JournalJournal of Alloys and Compounds
Publication statusPublished - 2013

Bibliographical note

Funding Information:
The authors would like to acknowledge the financial support of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) under the “Energy Efficiency & Resources Programs” (Project No. 2011201020005A) of the Ministry of Knowledge Economy, Republic of Korea.


  • Hydrogen separation
  • Intermetallic diffusion barrier
  • Palladium membrane
  • Porous nickel support
  • Sputtering method

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry


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