Characteristics of 2-inch DLC coated Si FEAs panel

Sanjo Lee; Byeong Kwon Ju; Ho Kwan Kang; Sung Moon; Yun Hi Lee; Myung Hwan Oh; D. Jeon

Characteristics of 2-inch DLC coated Si FEAs panel

Sanjo Lee, Byeong Kwon Ju, Ho Kwan Kang, Sung Moon, Yun Hi Lee, Myung Hwan Oh, D. Jeon

Department of Physics

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.

Original language	English
Pages (from-to)	374-377
Number of pages	4
Journal	SID Conference Record of the International Display Research Conference
Publication status	Published - 1997
Event	Proceedings of the 1997 17th Annual International Display Research Conference - Toronto, Can Duration: 1997 Sept 15 → 1997 Sept 19

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

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title = "Characteristics of 2-inch DLC coated Si FEAs panel",

abstract = "We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.",

author = "Sanjo Lee and Ju, {Byeong Kwon} and Kang, {Ho Kwan} and Sung Moon and Lee, {Yun Hi} and Oh, {Myung Hwan} and D. Jeon",

year = "1997",

language = "English",

pages = "374--377",

journal = "SID Conference Record of the International Display Research Conference",

issn = "1083-1312",

publisher = "Society for Information Display",

note = "Proceedings of the 1997 17th Annual International Display Research Conference ; Conference date: 15-09-1997 Through 19-09-1997",

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TY - JOUR

T1 - Characteristics of 2-inch DLC coated Si FEAs panel

AU - Lee, Sanjo

AU - Ju, Byeong Kwon

AU - Kang, Ho Kwan

AU - Moon, Sung

AU - Lee, Yun Hi

AU - Oh, Myung Hwan

AU - Jeon, D.

PY - 1997

Y1 - 1997

N2 - We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.

AB - We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.

UR - http://www.scopus.com/inward/record.url?scp=0031336136&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031336136&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0031336136

SN - 1083-1312

SP - 374

EP - 377

JO - SID Conference Record of the International Display Research Conference

JF - SID Conference Record of the International Display Research Conference

T2 - Proceedings of the 1997 17th Annual International Display Research Conference

Y2 - 15 September 1997 through 19 September 1997

ER -

Characteristics of 2-inch DLC coated Si FEAs panel

Abstract

ASJC Scopus subject areas

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