We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.
|Number of pages||4|
|Journal||SID Conference Record of the International Display Research Conference|
|Publication status||Published - 1997|
|Event||Proceedings of the 1997 17th Annual International Display Research Conference - Toronto, Can|
Duration: 1997 Sept 15 → 1997 Sept 19
ASJC Scopus subject areas
- Electrical and Electronic Engineering