Abstract
We have fabricated the 2-inch FEAs panel for which the silicon tips are coated with diamond-like carbon (DLC) film by lift-off technique using plasma enhanced chemical deposition. The turn-on voltage was lowered from 34 V to 19 V by DLC coating. However, there is some fluctuation of current for DLC coated arrays even though its average current is almost constant with time.
Original language | English |
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Pages (from-to) | 374-377 |
Number of pages | 4 |
Journal | SID Conference Record of the International Display Research Conference |
Publication status | Published - 1997 |
Event | Proceedings of the 1997 17th Annual International Display Research Conference - Toronto, Can Duration: 1997 Sept 15 → 1997 Sept 19 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering