Characteristics of rapid-thermal-annealed LiNi1-xCo xO2 cathode films for all-solid-state rechargeable thin film microbatteries

Han Ki Kim; Tae Yeon Seong; Young Soo Yoon

doi:10.1016/j.tsf.2003.07.024

Characteristics of rapid-thermal-annealed LiNi_1-xCo _xO₂ cathode films for all-solid-state rechargeable thin film microbatteries

Han Ki Kim, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journal › Conference article › peer-review

17 Citations (Scopus)

Abstract

We report on the characteristics of rapid-thermal-annealed LiNi _1-xCo_xO₂ cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi _1-xCo_xO₂ film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi _1-xCo_xO₂/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm²μm. It is concluded that the Li_yNi_1-xCo_xO₂ cathode could represent a promising candidate for a cathode film in TFBs.

Original language	English
Pages (from-to)	619-625
Number of pages	7
Journal	Thin Solid Films
Volume	447-448
DOIs	https://doi.org/10.1016/j.tsf.2003.07.024
Publication status	Published - 2004 Jan 30
Externally published	Yes
Event	Proceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States Duration: 2002 Apr 28 → 2002 May 2

Keywords

Capacity
Cyclibility
LiNiCoO
Rapid thermal annealing
Thin film microbattery

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2003.07.024

Cite this

@article{8eb54da601a14f2f942ff18ddbf0dc54,

title = "Characteristics of rapid-thermal-annealed LiNi1-xCo xO2 cathode films for all-solid-state rechargeable thin film microbatteries",

abstract = "We report on the characteristics of rapid-thermal-annealed LiNi 1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm2μm. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs.",

keywords = "Capacity, Cyclibility, LiNiCoO, Rapid thermal annealing, Thin film microbattery",

author = "Kim, {Han Ki} and Seong, {Tae Yeon} and Yoon, {Young Soo}",

note = "Funding Information: This work was supported in part by the Brain Korea 21 project and the National Research Laboratory project (Korea Institute of Science and Technology Evaluation and Planning). ; Proceedings of the 30th International Conference on Metallurgie ; Conference date: 28-04-2002 Through 02-05-2002",

year = "2004",

month = jan,

day = "30",

doi = "10.1016/j.tsf.2003.07.024",

language = "English",

volume = "447-448",

pages = "619--625",

journal = "Thin Solid Films",

issn = "0040-6090",

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TY - JOUR

T1 - Characteristics of rapid-thermal-annealed LiNi1-xCo xO2 cathode films for all-solid-state rechargeable thin film microbatteries

AU - Kim, Han Ki

AU - Seong, Tae Yeon

AU - Yoon, Young Soo

N1 - Funding Information: This work was supported in part by the Brain Korea 21 project and the National Research Laboratory project (Korea Institute of Science and Technology Evaluation and Planning).

PY - 2004/1/30

Y1 - 2004/1/30

N2 - We report on the characteristics of rapid-thermal-annealed LiNi 1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm2μm. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs.

AB - We report on the characteristics of rapid-thermal-annealed LiNi 1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm2μm. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs.

KW - Capacity

KW - Cyclibility

KW - LiNiCoO

KW - Rapid thermal annealing

KW - Thin film microbattery

UR - http://www.scopus.com/inward/record.url?scp=1342347441&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2003.07.024

DO - 10.1016/j.tsf.2003.07.024

M3 - Conference article

AN - SCOPUS:1342347441

SN - 0040-6090

VL - 447-448

SP - 619

EP - 625

JO - Thin Solid Films

JF - Thin Solid Films

T2 - Proceedings of the 30th International Conference on Metallurgie

Y2 - 28 April 2002 through 2 May 2002

ER -