Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark; Min Gu Kang; Sungeun Park; Seung Hun Lee; Chang Sik Son; Jeong Chul Lee; Donghwan Kim

doi:10.1016/j.cap.2010.08.005

Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Sung Ju Tark, Min Gu Kang, Sungeun Park, Seung Hun Lee, Chang Sik Son, Jeong Chul Lee, Donghwan Kim

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

Original language	English
Pages (from-to)	362-367
Number of pages	6
Journal	Current Applied Physics
Volume	11
Issue number	3
DOIs	https://doi.org/10.1016/j.cap.2010.08.005
Publication status	Published - 2011 May

Bibliographical note

Funding Information:
This work was supported by the New & Renewable Energy of the Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20093021010010) .

Keywords

Hydrogenated
RF magnetron sputter
Surface textured
TCO
ZnO:Al

ASJC Scopus subject areas

General Materials Science
General Physics and Astronomy

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.cap.2010.08.005

Cite this

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title = "Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications",

abstract = "In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.",

keywords = "Hydrogenated, RF magnetron sputter, Surface textured, TCO, ZnO:Al",

author = "Tark, {Sung Ju} and Kang, {Min Gu} and Sungeun Park and Lee, {Seung Hun} and Son, {Chang Sik} and Lee, {Jeong Chul} and Donghwan Kim",

note = "Funding Information: This work was supported by the New & Renewable Energy of the Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20093021010010) .",

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doi = "10.1016/j.cap.2010.08.005",

language = "English",

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T1 - Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

AU - Tark, Sung Ju

AU - Kang, Min Gu

AU - Park, Sungeun

AU - Lee, Seung Hun

AU - Son, Chang Sik

AU - Lee, Jeong Chul

AU - Kim, Donghwan

N1 - Funding Information: This work was supported by the New & Renewable Energy of the Korea Institute of Energy Technology Evaluation and Planning(KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20093021010010) .

PY - 2011/5

Y1 - 2011/5

N2 - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

AB - In this study, we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by RF magnetron sputtering. After their deposition, the surface of the HAZO films was multi-step textured in dilute HCl (0.5%) to investigate the change in their optical properties and surface morphology due to etching. The HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 50.81%. The microcrystalline silicon (μc-Si:H)-based p-i-n solar cells prepared using these new texture-etched HAZO substrates showed high quantum efficiencies in the long wavelength range, thereby demonstrating effective light trapping. Using the optimum AZO:H thin film textured surface, we achieved a p-i-n μc-Si solar cell efficiency of 7.08%.

KW - Hydrogenated

KW - RF magnetron sputter

KW - Surface textured

KW - TCO

KW - ZnO:Al

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M3 - Article

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SP - 362

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JO - Current Applied Physics

JF - Current Applied Physics

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ER -

Characterization of hydrogenated Al-doped ZnO films prepared by multi-step texturing for photovoltaic applications

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

UN SDGs

Access to Document

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