Characterization of sub-30 nm p+/n junction formed by plasma ion implantation

S. K. Baek, C. J. Choi, T. Y. Seong, H. Hwang, H. K. Kim, D. W. Moon

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Characterization of sub-30 nm p+/n junction formed by plasma ion implantation'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy